Magnetron sputtering system Leica EM ACE600
Trade name
Leica EM ACE600
Technical description
High vacuum magnetron sputtering system Lecia EM ACE600 for deposition of thin films from two independent metal target sources. The sputtering system contains:
- inner, integrated oil-free diaphragm pump and turbomolecular pump,
- two independent integrated magnetrons for metal-based targets,
- automated substrate table with controllable height, rotation and sputtering angle,
- quartz-crystal balance for layer thickness determination.
Conditions for providing infrastructure
Equipment made available on the terms applicable from the Regulations for the Use of ACMiN Research Infrastructure. (https://acmin.agh.edu.pl/acmin/dokumenty/)
Type of accreditation / certificate:
Not applicable
Access type
External
Research capabilities
Metallic thin films deposition
Last update date
Nov. 10, 2023, 12:44 p.m.
Year of commissioning
2018
Photos
Leica_EM_ACE600
Responsible body
Group / laboratory / team
Quantum Effects in Nanostructures