Plasma cleaner Harrick PDC-32G Plasma Cleaner
Plasma Cleaner is used to clean the surface of samples from impurities of organic origin or to activate the surface. The FlowMeter apparatus allows the application of oxygen or argon and their mixtures to generate plasma with a simulataneous control of the gas dosing. A dry oxygen vacuum pump allows for application of pure oxygen plasma.
Equipment is available based on on the terms of using research infrastructure of ACMiN. (https://acmin.agh.edu.pl/home/acmin/5_Wspolpraca/Aparatura/Zasady_i_koszty_korzystania_z_infrastruktury_badawczej_ACMiN.pdf)
The system is used for sample preparation.
Chamber size: Tube of 3 inches in diameter and 6.5 inches in length.
Maximum RF Power 18 W.
Responsible body
Group / laboratory / team
Department of Functional Materials and Nanomagnetism