FIB-SEM, SEM Scanning Electron Microscope with FIB Ion gun

Trade name
Crossbeam 350 (ZEISS)
Technical description

FIB-SEM Crossbeam 350 with GEMINI column and FEG electron source offers high resolution imaging using advanced detection modes including InLens (SE), InLens (EsB), Angle Selective Back-Scattered Detector (AsB). The imaging settings of the Gemini optics, such as accelerating voltage or beam current, are continuously adjustable. The parallel detection of secondary electrons (SE) in the axis of the objective lens and energy-selective backscatter (EsB) allows you to easily identify the smallest differences in the chemical composition of materials. Equipped with an advanced FIB focused ion beam system, which enables quick and precise removal of the material layer and cutting samples (lamellae) for TEM. FIB-SEM Crossbeam 350 with FIB-SEM Crossbeam 350 with GEMINI  column and FEG electron source offers high resolution imaging using advanced detection modes including InLens (SE), InLens (EsB), Angle Selective Back-Scattered Detector (AsB). The imaging settings of the Gemini II optics, such as accelerating voltage or beam current, are continuously adjustable. The parallel detection of secondary electrons (SE) in the axis of the objective lens and energy-selective backscatter (EsB) allows you to easily identify the smallest differences in the chemical composition of materials. Equipped with an advanced FIB focused ion beam system, which enables quick and precise removal of the material layer and cutting samples (lamellae) for TEM. FIB-SEM Crossbeam 350 with GEMINI I column and FEG electron source offers high resolution imaging using advanced detection modes including InLens (SE), InLens (EsB), Angle Selective Back-Scattered Detector (AsB). The imaging settings of the Gemini I optics, such as accelerating voltage or beam current, are continuously adjustable. The parallel detection of secondary electrons (SE) in the axis of the objective lens and energy-selective backscatter (EsB) allows you to easily identify the smallest differences in the chemical composition.

Conditions for providing infrastructure

On terms agreed with the Head of the Laboratory - dr hab. Eng. Adam Kruk, prof. AGH

Type of accreditation / certificate:
Not applicable
Access type
External
Research capabilities

Microstructure imaging in secondary SE and backscattered electrons of BSE. FIB-SEM tomography. Prepering the lamellas for TEM investigation.

Last update date
Feb. 22, 2023, 8:13 a.m.
Year of commissioning
2023
Measurement capabilities

Chemical composition studies, high resolution, nanoscale orientation measurements

Photos
FIB-SEM
FIB-SEM