Scanning electron microscope equipped with ion gun (SEM/FIB)
The Quanta 3D 200i dual beam (SEM/FIB) microscope is a device dedicated to the preparation of thin films for TEM/STEM research. The instrument is equipped with two guns: electron (tungsten filament) and ion (Ga+), a system of precise dosing of working gases (GIS) for the deposition of Pt/W and a micromanipulator (Omniprobe) for thin sample transfer. The microscope enables the preparation of thin lamellae from the majority of existing engineering materials (metals, alloys, ceramics, polymers, composites, coatings), from a place in the sample selected with an accuracy of several micrometers. The microscope is also equipped with an Energy Dispersive X-ray Spectrometer (EDS) and an Electron Backscattered Diffraction (EBSD) detector.
The microscope is characterized by the following operating parameters:
- electron source - W filament
- accelerating voltage (electrons) - 0.5-30 kV
- accelerating voltage (ions) - 2-30 kV
- ion beam currents - 1.5 pA - 65 nA
- detectors: LFD, GSED, SS STEM, Low kv SS BSED
- micromanipulator: Omniprobe Model 100.7
- GIS W
Equipment is available in accordance with the Regulations for the Use of ACMiN's Research Infrastructure. (https://acmin.agh.edu.pl/acmin/dokumenty/)
Preparation of thin lamellae for TEM/STEM investigation.
Imaging using secondary (SE) and backscattered (BSE) electrons detectors.
EDS analysis of chemical composition.
EBSD analysis of crystallographic orientation distribution


Responsible body
Group / laboratory / team
Department of Materials Engineering