Scanning electron microscope equipped with ion gun (SEM/FIB)

Trade name
Quanta 3D 200i FIB/SEM (FEI)
Technical description

The Quanta 3D 200i dual beam (SEM/FIB) microscope is a device dedicated to the preparation of thin films for TEM/STEM research. The instrument is equipped with two guns: electron (tungsten filament) and ion (Ga+), a system of precise dosing of working gases (GIS) for the deposition of Pt/W and a micromanipulator (Omniprobe) for thin sample transfer. The microscope enables the preparation of thin lamellae from the majority of existing engineering materials (metals, alloys, ceramics, polymers, composites, coatings), from a place in the sample selected with an accuracy of several micrometers. The microscope is also equipped with an Energy Dispersive X-ray Spectrometer (EDS) and an Electron Backscattered Diffraction (EBSD) detector.

The microscope is characterized by the following operating parameters:

- electron source - W filament

- accelerating voltage (electrons) - 0.5-30 kV

- accelerating voltage (ions) - 2-30 kV

- ion beam currents - 1.5 pA - 65 nA

- detectors: LFD, GSED, SS STEM, Low kv SS BSED

- micromanipulator: Omniprobe Model 100.7


Conditions for providing infrastructure

Equipment is available in accordance with the Regulations for the Use of ACMiN's Research Infrastructure. (

Type of accreditation / certificate:
Not applicable
Access type
Research capabilities

Preparation of thin lamellae for TEM/STEM investigation.

Imaging using secondary (SE) and backscattered (BSE) electrons detectors.

EDS analysis of chemical composition.

EBSD analysis of crystallographic orientation distribution

Last update date
Aug. 29, 2023, 11:42 a.m.
Year of commissioning
Quanta 3D 200i FIB/SEM (FEI)
Quanta 3D 200i FIB/SEM (FEI)