Station for the production and in situ research of sensor nanostructures

Trade name
Station for the production and in situ research of sensor nanostructures
Technical description

Technological and measuring station consisting of 5 independent chambers that meet the standards of ultra-high vacuum (UHV) by PREVAC

Conditions for providing infrastructure

To be agreed with the Head of the ZLNS Laboratory

Type of accreditation / certificate:
Not applicable
Access type
External
Research capabilities

Deposition of thin layers by reactive magnetron sputtering

Last update date
Aug. 29, 2023, 11:55 a.m.
Year of commissioning
2019
Measurement capabilities

In-situ measurements using the Kelvin probe and the four-point resistance probe

Photos
Zintegrowane Laboratorium Nanostruktur Sensorowych
Zintegrowane Laboratorium Nanostruktur Sensorowych