Equipment
Pulsed Laser Deposition System
Contact person:
Naumov Andrii
Technical description:
The PLD system allows the fabrication of epitaxial films, multilayer heterostructures, superlattices, and amorphous layers from various materials (metals, nonmetals, oxides, ceramics, etc.) on a variety of substrates. Our system is equipped with a m…
High-resolution electron beam lithography system
Contact person:
Jurzecka-Szymacha Maria
Technical description:
The Class 100 clean room houses the electron lithography unit (Raith eLine+). The system consists of an electron gun, a secondary electron detector, an in-lens detector, a laser interferometer, control electronics, and a pump system to maintain adeq…
