Equipment
Vacuum system for thin films sputtering and nanoparticles deposition
Contact person:
Jabłoński Piotr
Technical description:
The deposition system consists of two vacuum chambers made by Mantis, which fulfil the conditions of high vacuum (HV). The first chamber enables the deposition of metal or metal oxide nanoparticles by means of the Inert Gas Condensation (IGC) method…
