Scanning electron microscope FEI Quanta 200 FEG
High-resolution scanning electron microscope with hot field emission (FEG - highly stable Schottky electron emitter), magnification 70 ÷ 300,000x
Technical parameters:
- Accelerating voltage 5 - 30 kV
- Variable vacuum system:
- high vacuum (HV) approx. 10-4 Pa
- low vacuum (LV) 50÷200 Pa
- ESEM mode 200÷2000 Pa
- Resolution:
< 2.0nm at 30kV (HV)
< 3.5nm at 30kV (LV)
< 2.0nm at 30kV (ESEM)
Detectors:
• Everhart-Thornley SED
• SED (to LV)
• SED (to ESEM)
• BSED (silicon solid state)
• BSED (up to ESEM)
• Centaurus – photomultiplier with BSE and CL detection tips
• EBSD (for recording backscattered electron diffraction)
• Silicon liquid nitrogen cooled X-ray detector with EDS spectrometer (EDAX)
- according to the regulations listed on the laboratory's website: http://wydzlab.agh.edu.pl/wp-content/uploads/2020/11/Regulamin-WLBFSTiG.pdf
- scientific and research cooperation with AGH units and other domestic and foreign scientific units
- cooperation within the projects of NCN, NCBiR, cooperation with industry and under contracts
• observation of the surface of mineral, synthetic and biological substances
• qualitative and quantitative analysis of elements in the sample (EDXS)
• analysis of the distribution of elements in the micro-area (EDXS)
• image analysis in cathodoluminescence CL - in gray scale mode
• Kikuchi diffraction analysis (EBSD) - phase identification and OIM crystallite orientation maps
Registration, in a variable vacuum, of images generated by:
• secondary electrons SD - topographic contrast
• BSE backscattered electrons – difference contrast Z and indicative
• characteristic X-rays of elements - mapping
• radiation in the visible range – cathodoluminescence CL
• EBSD - Kikuchi diffraction


Responsible body
Group / laboratory / team
The Faculty Laboratory for Phase, Structural, Textural and Geochemical Studies