Scanning electron microscope FEI Quanta 200 FEG

Trade name
Scanning electron microscope FEI Quanta 200 FEG
Technical description

 High-resolution scanning electron microscope with hot field emission (FEG - highly stable Schottky electron emitter),  magnification 70 ÷ 300,000x

Technical parameters:

  • Accelerating voltage 5 - 30 kV
  • Variable vacuum system:

- high vacuum (HV) approx. 10-4 Pa

- low vacuum (LV) 50÷200 Pa

- ESEM mode 200÷2000 Pa

  • Resolution:

< 2.0nm at 30kV (HV)

< 3.5nm at 30kV (LV)

< 2.0nm at 30kV (ESEM)


• Everhart-Thornley SED

• SED (to LV)

• SED (to ESEM)

• BSED (silicon solid state)

• BSED (up to ESEM)

• Centaurus – photomultiplier with BSE and CL detection tips

• EBSD (for recording backscattered electron diffraction)

• Silicon liquid nitrogen cooled X-ray detector with EDS spectrometer (EDAX)

Conditions for providing infrastructure

- according to the regulations listed on the laboratory's website:
- scientific and research cooperation with AGH units and other domestic and foreign scientific units
- cooperation within the projects of NCN, NCBiR, cooperation with industry and under contracts

Type of accreditation / certificate:
Not applicable
Access type
Research capabilities

• observation of the surface of mineral, synthetic and biological substances

• qualitative and quantitative analysis of elements in the sample (EDXS)

• analysis of the distribution of elements in the micro-area (EDXS)

• image analysis in cathodoluminescence CL - in gray scale mode

• Kikuchi diffraction analysis (EBSD) - phase identification and OIM crystallite orientation maps

Last update date
June 10, 2023, 11:02 p.m.
Year of commissioning
Measurement capabilities

Registration, in a variable vacuum, of images generated by:

• secondary electrons SD - topographic contrast

• BSE backscattered electrons – difference contrast Z and indicative

• characteristic X-rays of elements - mapping

• radiation in the visible range – cathodoluminescence CL

• EBSD - Kikuchi diffraction


Scanning electron microscop
Scanning electron microscop