Equipment
High-resolution electron beam lithography system
Contact person:
Chrobak Maciej
Technical description:
The Class 100 clean room houses the electron lithography unit (Raith eLine+). The system consists of an electron gun, a secondary electron detector, an in-lens detector, a laser interferometer, control electronics, and a pump system to maintain adeq…
Ion etching and layer deposition system
Contact person:
Chrobak Maciej
Technical description:
The Class 1000 clean room houses the Microsystems IonSys 500 ion etching and thin film deposition device. The system is equipped with an ion gun along with a SIMS detector, which enables the etching of thin films with nanometer precision, and a magn…
Integrated System for Low-Intensity Signal Detection
Contact person:
Chrobak Maciej
Technical description:
The Keithley 4200A-SCS is a complete semiconductor parameter analyzer equipped with four SMU measurement modules (4201-SMU) and one 4215-CVU capacitance–voltage module, enabling a full range of I-V, C-V, C-f, C-t, and AC impedance measurements…
HB05 Bonder with microscope and heater
Contact person:
Chrobak Maciej
Technical description:
The HB05 Bonder equipped with an optical microscope and a heating stage, allows to make metallic connections between sample holder and sample using gold or aluminum wire with a thickness of 25 µm.
Dilution refrigerator with magnet
Contact person:
Chrobak Maciej
Technical description:
The 3He/4He dilution refrigerator operating in a closed cycle allows reaching and stabilizing temperatures in the range from 10 mK to 30 K. Cooling power at 100 mK is 200 μW, and at 20 mK is 4 μW. The integrated superconducting magnet allows t…
