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DualBeam Focused Ion Beam/Scanning Electron Microscop (FIB/SEM)

Contact person: Berent Katarzyna
Technical description: FEI Versa 3D double-beam high-resolution scanning electron microscope equipped with a Field Emission Gun (FEG) and a Focused Ion Beam (FIB). It enables operation with accelerating voltage in the range from 500 V to 30 kV (max. electron beam current …