Equipment
Magnetron sputtering system Leica EM ACE600
Contact person:
Jabłoński Piotr
Technical description:
High vacuum magnetron sputtering system Lecia EM ACE600 for deposition of thin films from two independent metal target sources. The sputtering system contains:
inner, integrated oil-free diaphragm pump and turbomolecular pump,
two independen…
