DualBeam Ultra-high-resolution Scanning Electron Microscop with Xenon (Xe) Plasma Focused Ion Beam (PFIB/SEM) with Atomic Force Microscope (AFM)

Helios 5 is a double-beam ultra-high-resolution scanning electron microscope equipped with a high-stability Schottky Field Emission Gun (FEG) and a Plasma Focused Ion Beam (PFIB). It enables operation with accelerating voltage in the range from 350 V to 30 kV (max. electron beam current 100 nA), the landing energy range from 20 eV to 30 keV, and a resolution of 0.7 nm at 1 kV for a gold particle standard sample. Maximum horizontal field width is 2.3 mm at 4 mm WD.

The microscope is equipped with:

• detectors: Elstar in-lens detector (TLD-SE, TLD-BSE); Elstar in-column detector (ICD - SE/BSE); Everhart-Thornley SE detector (ETD); retractable low voltage, high contrast directional solid-state backscatter electron detector (DBS); high-performance in-chamber electron and ion detector (ICE) for secondary ions (SI) and electrons (SE),
• retractable STEM3+ detector with BF/DF/HAADF segments,
• Ultim MAX 60 Energy Dispersive X-ray Spectrometer (EDS) and the Symmetry S3 CMOS camera by Oxford Instruments, enabling measurements of Electron Backscatter Diffraction (EBSD),
• high-performance PFIB column with inductively coupled Xe⁺ Plasma and Gas Injection System (GIS). Possibility of platinum (Pt) and tungsten (W) deposition,
• nanoindenter FT-NMT04 from FemtoTools,
• Auto Slice&View software,
• LiteScope AFM-in-SEM stage from NenoVision.

Maximum dimensions of samples – diameter: 110 mm, height: 65 mm; weight: 500g.