Equipment
DualBeam Ultra-high-resolution Scanning Electron Microscop with Xenon (Xe) Plasma Focused Ion Beam (PFIB/SEM) with Atomic Force Microscope (AFM)
Contact person:
Berent Katarzyna
Technical description:
Helios 5 is a double-beam ultra-high-resolution scanning electron microscope equipped with a high-stability Schottky Field Emission Gun (FEG) and a Plasma Focused Ion Beam (PFIB). It enables operation with accelerating voltage in the range from 350 …