Equipment

Scanning Electron Microscope setup

Entity: Department of Ceramics and Refractories

Technical description: SEM microscopes with electron (FEG) and ionic columns (Gallium – Scios 2). The SEMs include EDS spectroscopes (EDAX), catodoluminescence (GATAN AMETEK) and time of flight secondary ions mass spectroscope, TOF-SIMS. The microscopes are equipped…

Keywords: CL ebsd ECCI EDS ion beam microstructure morphology SEM STEM TOF-SIMS