DualBeam Focused Ion Beam/Scanning Electron Microscop (FIB/SEM)

Trade name
FEI Versa 3D
Technical description

FEI Versa 3D double-beam high-resolution scanning electron microscope equipped with a Field Emission Gun (FEG) and a Focused Ion Beam (FIB). It enables operation with accelerating voltage in the range from 500 V to 30 kV (max. electron beam current 200 nA). The resolution is 1 nm at 30 kV for a gold particle standard sample.

The microscope is equipped with:

  • detectors - Everhart-Thornley SE Detector (ETD), Circular Backscatter Detector (CBS), Low Vacuum Secondary Electron Detector (LVSED), Gaseous Secondary Electron Detector (GSED),
  • retractable STEM detector with BF/DF/HAADF segments
  • Ultim MAX 40 Energy Dispersive X-ray Spectrometer (EDS) and the Symmetry S2 CMOS camera by Oxford Instruments, enabling measurements of Electron Backscatter Diffraction (EBSD),
  • High-current ion column with Ga liquid metal ion source and Gas Injection System (GIS),
  • two heating stages (to 1000°C and 1500°C),
  • Peltier stage,
  • nanoindenter FT-NMT04 Femtotools,
  • Auto Slice&View software,
  • a system of two nanomanipulators (mibots) by Imina.

Maximum dimensions of samples – diameter: 150 mm, height: 55 mm; weight: 500g.

Conditions for providing infrastructure

Equipment is available in accordance with the Regulations for the Use of ACMiN's Research Infrastructure. (https://acmin.agh.edu.pl/acmin/dokumenty/)

Type of accreditation / certificate:
Not applicable
Access type
Research capabilities
  1. Microstructural observations of conductive and dielectric materials.
  2. In-situ measurements:
    • Peltier stage and heating stages,
    • nanomanipulators for electrical properties measurements,
    • nanoindenter.
  3. Electron tomography (SEM/FIB) - 3D microstructure reconstruction.
  4. Analyzes of chemical composition EDS.
  5. Crystallographic orientation analysis using EBSD.
Last update date
May 25, 2023, 11:25 a.m.
Year of commissioning
Measurement capabilities
  1. The size and shape analyses of particles and pores, thickness measurement of micro- and nanocoatings.
  2. STEM observations:
    • Bright Field (BF),
    • Dark Field (DF),
    • High-Angle Annular Dark Field (HAADF).
  3. Three vacuum modes:
    • High vacuum (HV),
    • Low vacuum (LV),
    • Environmental (ESEM).
FEI Versa 3D Scanning Electron Microscope
FEI Versa 3D Scanning Electron Microscope