DualBeam High-resolution Scanning Electron Microscop with Gallium Focused Ion Beam (FIB/SEM)
FEI Versa 3D double-beam high-resolution scanning electron microscope equipped with a Field Emission Gun (FEG) and a Focused Ion Beam (FIB). It enables operation with accelerating voltage in the range from 500 V to 30 kV (max. electron beam current 200 nA). The resolution is 1 nm at 30 kV for a gold particle standard sample.
The microscope is equipped with:
- detectors - Everhart-Thornley SE Detector (ETD), Circular Backscatter Detector (CBS), Low Vacuum Secondary Electron Detector (LVSED), Gaseous Secondary Electron Detector (GSED),
- retractable STEM detector with BF/DF/HAADF segments
- Ultim MAX 40 Energy Dispersive X-ray Spectrometer (EDS) and the Symmetry S2 CMOS camera by Oxford Instruments, enabling measurements of Electron Backscatter Diffraction (EBSD),
- High-current ion column with Ga liquid metal ion source and Gas Injection System (GIS),
- two heating stages (to 1000°C and 1500°C),
- Peltier stage,
- nanoindenter FT-NMT04 Femtotools,
- Auto Slice&View software,
- a system of two nanomanipulators (mibots) by Imina.
Maximum dimensions of samples – diameter: 150 mm, height: 55 mm; weight: 500g.
Equipment is available in accordance with the Regulations for the Use of ACMiN's Research Infrastructure. (https://acmin.agh.edu.pl/home/acmin/5_Wspolpraca/Aparatura/Zasady_i_koszty_korzystania_z_infrastruktury_badawczej_ACMiN.pdf)
- Microstructural observations of conductive and dielectric materials.
- In-situ measurements:
- Peltier stage and heating stages,
- nanomanipulators for electrical properties measurements,
- nanoindenter.
- Electron tomography (SEM/FIB) - 3D microstructure reconstruction.
- Analyzes of chemical composition EDS.
- Crystallographic orientation analysis using EBSD.
- The size and shape analyses of particles and pores, thickness measurement of micro- and nanocoatings.
- STEM observations:
- Bright Field (BF),
- Dark Field (DF),
- High-Angle Annular Dark Field (HAADF).
- Three vacuum modes:
- High vacuum (HV),
- Low vacuum (LV),
- Environmental (ESEM).
Responsible body
Group / laboratory / team
Department of Functional Materials and Nanomagnetism