Equipment

DualBeam High-resolution Scanning Electron Microscop with Gallium Focused Ion Beam (FIB/SEM)

Entity: Academic Centre for Materials and Nanotechnology

Technical description: FEI Versa 3D double-beam high-resolution scanning electron microscope equipped with a Field Emission Gun (FEG) and a Focused Ion Beam (FIB). It enables operation with accelerating voltage in the range from 500 V to 30 kV (max. electron beam current …

Keywords: ebsd EDS Electron tomography FIB FIB-SEM SEM SEM-BSE SEM-EDX SEM-SE

Scanning electron microscope, SEM

Entity: Faculty of Metals Engineering and Industrial Computer Science

Contact person: Kruk Adam

Technical description: MERLIN with GEMINI II column and FEG electron source offers high-resolution imaging with advanced detection modes, including InLens (SE), InLens (EsB), Angle Selective Back-Scattered Detector (AsB), 3DSM and STEM. The imaging settings of the Gemini …

Keywords: SEM-BSE SEM-EDX SEM-SE