Equipment
DualBeam High-resolution Scanning Electron Microscop with Gallium Focused Ion Beam (FIB/SEM)
Contact person:
Berent Katarzyna
Technical description:
FEI Versa 3D double-beam high-resolution scanning electron microscope equipped with a Field Emission Gun (FEG) and a Focused Ion Beam (FIB). It enables operation with accelerating voltage in the range from 500 V to 30 kV (max. electron beam current …