Equipment

DualBeam High-resolution Scanning Electron Microscop with Gallium Focused Ion Beam (FIB/SEM)

Entity: Academic Centre for Materials and Nanotechnology

Technical description: FEI Versa 3D double-beam high-resolution scanning electron microscope equipped with a Field Emission Gun (FEG) and a Focused Ion Beam (FIB). It enables operation with accelerating voltage in the range from 500 V to 30 kV (max. electron beam current …

Keywords: ebsd EDS Electron tomography FIB FIB-SEM SEM SEM-BSE SEM-EDX SEM-SE